General

Transport speed

180~1800mm/min

Transport weight

290~360mm(Manual adjustment)

Guide strip

Supplies

Alarm lamp 3 color

general type (IN:NA Out:NA)

Clean level

class 1000

Clean room belt

YES

Transport layer for holdder

bring sersor dectection wafer

Carrier 10 Layer

follow the provider spec to design

Lifting mechanism modle

modle can trasfer 90 degree to door face, for operater to repair.

EMO

Turn to release EMO(cover for debug)

SMEMA connector

YES

System Labels

chinese simplified

Power

AC 1 Φ 200/220V% ±10

Carrier layer and layer distance

10mm +0.5

Material Handling

Material

Glass, Si, MC wafer, Glass+MC wafer, Si+MC wafer，Glass+Si

Equipment Performance

Uptime

>95%

Wafer transfer failure rate

＜10PPM

Unscheduled downtime

<3% (By month)

Scheduled downtime

<2% (By month)

MTBF

>500 hrs

MTBA

> 200hrs

MTBR

<3hrs

Critical parts coverage

100% local stock

WPH

30

Equipment Requirement SPEC

Conveyor width

Conveyor width adjustment (290~360mm)

Aligner

305mm±2.0mm

SUS Chamber encapsulated System

Fully SUS Chamber encapsulated System with low Nitrogen Atmosphere

Transport hight

920 mm±20mm

Speed regulation and control per circuit

YES

Flatscreen monitor and signal tower

Three color

Temperature limit

<70 ℃

SMEMA

Interface for handling systems, SMEMA