關於我們
產品與業務
代理產品
專業設計服務
最新消息
人才招募
聯絡我們
點膠檢測設備
UV固化設備、相關產品
流體控制器、閥體
脫泡設備
半導體產業
|
Specifications |
|
|
1.Basic |
|
|
Dimension (2 Loadport) |
W2530 x L3000 x H2315 mm |
|
Dimension (4 Loadport) |
W2530 x L4670 x H2315 mm |
|
Weight |
220~300 kg |
|
Panel/Wafer transfer size |
300x300 ~ 625x625 mm |
|
FOUP Loader |
2 pcs / 4 pcs |
|
SECS/GEM |
GEM200 / GEM300 |
|
2.Power |
|
|
控制系統負載 |
3P 208 VAC 50/60 Hz；75A |
|
3.Non-Contact Alignment Ability |
|
|
Product Size |
300x300 ~ 625x625 mm |
|
Product Type |
Compound / Metal / Glass |
|
Detection range |
±12mm |
|
Detection accuracy |
±0.2mm |
|
5.Transfer |
|
|
Product Size |
300x300 ~ 625x625 mm |
|
Product Size |
Compound / Metal / Glass |
|
UPH |
100 pcs/hr |
|
X axis accuracy |
±0.2mm |
|
Robot Y axis accuracy |
±0.2mm |
|
Robot Z axis accuracy |
±0.2mm |
|
6.Quality |
|
|
ESD |
< 25V |
|
無塵等級 |
符合FS209 Class 100等級 |
|
Vibration |
≦0.3G (RMS.) |
|
7.Safety |
|
|
SEMI 認證 |
符合SEMI S2、S8、S10認證 |
|
設備結構認證 |
符合SEMI規範 |
|
